
Tässä kandidaatintyössä käsitellään erilaisia painettuja lämmittimiä pääpainon ollessa kuitenkin matalan sintrauslämpötilan keraami alustalle (LTCC) painetussa lämmittimessä. LTCC lämmittimiä on kehitetty, kun on haluttu yhdistää paksukalvolämmittimen ja piipohjaisen lämmittimen etuja. LTCC -rakenteen edut ovat, että sillä voidaan muodostaa 3D-rakenteita sekä se on kestävä ja melko edullinen valmistusmenetelmä. Tässä kandidaatintyössä valmistettiin kaksi erilaista rakennetta, jotka ovat kannatettu sekä peitetty rakenne. Näistä valmisteltiin testikappaleet, joiden suorituskykyä tarkasteltiin.
In this bachelor thesis different kinds of printed heaters are discussed, with main attention put on low temperature co-fired ceramics (LTCC) based ones. Other types of printed heaters structures include thick-film, thin-film and micro heaters. LTCC is found to have very good electrical and mechanical properties, high reliability and stability, and furthermore the possibility of making three dimensioal (3D) microstructures. In this study heaters were fabricated onto LTCC substrate with screen printing method and two basic structures were made, buried and suspended one.
Electrical Engineering
Electrical Engineering
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