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Realization of the Kelvin Probe System for the Surface Treatment of a Semiconductor

Authors: Zegadi, C.; Lounis, Z.; Haichour, A.; Kaddour, A. Hadj; Ghaffor, D.;

Realization of the Kelvin Probe System for the Surface Treatment of a Semiconductor

Abstract

Знання електричних властивостей матеріалів неминуче в поверхневих технологіях, таких як мікротехнологія, корозія тощо. Що стосується поверхневих явищ, то робота виходу являє собою основну властивість. Вона була розроблена лордом Кельвіном і відповідає контактній різниці потенціалів між двома поверхнями матеріалів. У роботі збирання даних системи зонду Кельвіна (KPS) проводилося після послідовних випробувань в електронних обчисленнях і фізичних полях з метою отримання роботи виходу провідникових і напівпровідникових матеріалів. Ця система виявила велике значення управління напругою підтримки Vb для обчислення конденсатора, застосованого в структурі метал-діелектрикнапівпровідник (MIS) для вимірювання поверхневого потенціалу напівпровідників. Деякі проблеми були вирішені під час створення системи, і відповідна частота 50 Гц була належним чином відрегульована. Однак вольт-амперне перетворення в KPS не проводилося через нечутливість використаних підсилювачів. Щоб зрозуміти цю складність експериментального дослідження сигналу, ми використали обчислення за допомогою коду Фортран. Воно підтвердило, що сигнал зонда Кельвіна має дуже слабку амплітуду порядка піковольт. З іншого боку, завдяки іншим доступним вимірювальним приладам, чутливість яких значно нижча, ніж сам сигнал, ці результати виправдовують експериментальні кроки. The knowledge of the electrical properties of materials is inevitable in surface technologies, such as microtechnology, corrosion, etc. Concerning the surface phenomena, the work function represents the main property. It was developed by Lord Kelvin and it corresponds to the contact potential difference between two surfaces of materials. In this project, the data acquisition of Kelvin Probe System (KPS) was performed after sequential tests in electronic computing and physical fields in order to acquire the work function of conductor and semiconductor materials. This system has revealed the great importance of controlling the support voltage Vb calculating the capacitor applied to the Metal-Insulator-Semiconductor (MIS) structure in order to measure the surface potential of the semiconductors. Some problems were solved during the assembly of the system and the pertinent frequency of 50 Hz was suitably adjusted. However, the conversion of current-voltage was not carried out in KPS due to the insensitivity of the amplifiers on hand. To understand this difficulty in signal experimental study, we have used a calculation by a Fortran code. The latter has confirmed that the signal of Kelvin probe is a very weak amplitude of the order of pico-volts. Because of the available measuring devices whose sensitivity is much lower than the signal itself, on the other hand, these results justify the experimental steps.

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Keywords

поверхневі явища, Kelvin probe, MIS structure, контактна різниця потенціалів, contact potential difference, surface phenomena, зонд Кельвіна, структура MIS

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selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
1
Average
Average
Average
Green