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Optical Characterization of a Thin-Film Material Based on Light Intensity Measurements

Authors: Lovetskiy K.P.; Nikolaev N.E.; Sevastianov A.L.;

Optical Characterization of a Thin-Film Material Based on Light Intensity Measurements

Abstract

Light interacts with materials in a variety of ways; this article focuses on determination of refraction and absorption characterized by a material’s refractive index. We discuss some of the useful models for the frequency dependence of the refractive index, and practical approaches to calculating refractive indices of thin films and thick substrates. The efficiency of manufacturing of existing and successful creation of new devices of solid-state micro- and nanoelectronics largely depends on the level of development of the technology for manufacturing layers of various materials with a thickness of several nanometers to tens of micrometers. A high degree of perfection of layered structures and particularly structures based on dielectric and/or metallic films with nanometer thickness is needed for their successful application in micro-, nano-, acousto-, microwave and optoelectronics. It is impossible to achieve high degree of perfection without the use of high-precision methods of measuring electrophysical parameters of dielectric and semiconductor materials and structures, metallic films. We have developed the program “Multilayer”, which serves both to simulate the propagation of light through multilayer thin-film layered media, and to determine the dielectric (permittivity tensor of anisotropic films) and geometric (physical and optical thicknesses of the film) parameters of various thin-film coatings. The base mathematical models applied for the description of the light wave propagation through a homogeneous optical medium and for the determination of the optical characteristics of thin layers of optical materials based on the results of light intensity measurements are described. The main mathematical formalism employed in the program is based on solving the Maxwell’s equations for propagation of light through anisotropic stratified media. The algorithm uses the Berreman matrices of order

Свет взаимодействует с материалами различными способами; данная статья посвящена определению преломления и поглощения, характеризуемым показателем преломления материала. Обсуждаются некоторые полезные модели частотной зависимости показателя преломления, а также практические способы расчёта показателей преломления тонких плёнок и толстых подложек. Эффективность производства существующих и успешное создание новых приборов твердотельной микро- и наноэлектроники во многом зависит от уровня развития технологии изготовления слоёв различных материалов толщиной от нескольких нанометров до десятков микрометров. Достижение высокой степени совершенства слоистых структур и, в частности, структур на основе нанометровых диэлектрических и/или металлических плёнок, которое и определяет возможность их успешного применения в микро-, нано-, акусто-, СВЧ- и оптоэлектронике, невозможно без использования высокоточных методов измерений электрофизических параметров диэлектрических и полупроводниковых материалов и структур, металлических плёнок. Разработана программа «Многослойность», которая служит как для моделирования распространения света через многослойные тонкоплёночные слоистые среды, так и для определения диэлектрических (тензор диэлектрической проницаемости анизотропных плёнок) и геометрических (физическая и оптическая толщина плёнка) параметров различных тонкоплёночных покрытий. Дано описание основных математических моделей, применяемых для описания распространения световой волны в однородной оптической среде и для определения оптических характеристик тонких слоёв оптических материалов на основе результатов измерений интенсивности света. Математический формализм, используемый в программе, основан на решении уравнений Максвелла при распространении света через анизотропную слоистую среду. Алгоритм использует матрицы Берремана порядка

Related Organizations
Keywords

reflectance, thin films, коэффициент отражения, transmittance, тонкие плёнки, refractive indices determination, коэффициент пропускания, определение показателей преломления

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selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
0
Average
Average
Average
Green
hybrid