The Co–Cr–Cu–Fe–Ni–Zn compositional library was studied on a combinatorial high-entropy alloy thin film processed on a silicon substrate by magnetron sputtering technique. The thickness of the coating was between 2 and 3 μm while the lateral dimension was 10 cm. The chemical composition in the layer depended on the location and for each constituent element the concentration varied between 5 and 42 at.%. The phase composition and the microstructure were mapped using synchrotron X-ray diffraction, and the crystallite size as well as the density of lattice defects (dislocations and twin faults) were determined by diffraction line profile profile analysis. In addition, selected locations were studied by transmission electron microscopy. The influence of the chemical composition on the microstructure and the mechanical behavior was revealed. The mechanical performance was characterized by nanoindentation mapping which determined the hardness and the elastic modulus versus the element concentrations. It was found that the coating contains single phase face-centered cubic (FCC) and body-centered cubic (BCC) regions as well as an intermediate two-phase area. In the whole combinatorial sample, the microstructure consisted of nanocrystalline columns growing perpendicular to the coating surface and having pores between them. Due to the porosity, the hardness and the elastic modulus were relatively low despite the nanostructure and the very high defect density. The highest hardness (3.4 GPa) and elastic modulus (119 GPa) were measured in the BCC region with the chemical composition of 10%Co–38%Cr–13%Cu–27%Fe–5%Ni–7%Zn (at.%).

Journal of materials research and technology 31, 47 - 61 (2024). doi:10.1016/j.jmrt.2024.06.059

Published by Elsevier, Rio de Janeiro