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Hybrid-driven modeling using a BiLSTM–AdaBoost algorithm for diameter prediction in the constant diameter stage of Czochralski silicon single crystals

Authors: Yu-Yu Liu; Ding Liu; Shi-Hai Wu; Yi-Ming Jing;

Hybrid-driven modeling using a BiLSTM–AdaBoost algorithm for diameter prediction in the constant diameter stage of Czochralski silicon single crystals

Abstract

During the preparation of electronic-grade silicon single crystals (SSC), accurately predicting the crystal diameter is crucial for obtaining high-quality crystals. In this paper, a hybrid-driven modeling method integrating Bidirectional Long Short-Term Memory network (BiLSTM) and Adaptive Boosting (AdaBoost) algorithm is proposed, aiming to improve the accuracy and stability of crystal diameter prediction in the medium diameter stage of the SSC growth by the Czochralski (CZ) method. First, the initial prediction of SSC diameter is performed using a mechanistic model and the prediction error is calculated; then, the time series data are processed using a BiLSTM network to generate the predicted values at each time point. Subsequently, the prediction results of the BiLSTM network are weighted and fused by the AdaBoost algorithm to obtain the final time series prediction output, and the prediction performance is further enhanced by iterative optimization. Compared with the traditional mechanistic model or a single data-driven model, this hybrid model retains the explanatory nature of the mechanistic model while also ensuring the accuracy of the data-driven model, which effectively overcomes the challenges posed by complex coupling and nonlinear problems.

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Keywords

Czochralski silicon single crystals, Mechanistic modeling, Science, Q, R, Hybrid drive modeling, Medicine, Adaptive boosting algorithms, Long short-term memory network, Article

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selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
2
Top 10%
Average
Average
Green
hybrid