In the review the analysis of literature results about effect of strain deformation in thin and thick films metals, alloys or composite materials on base a metal is lead. Are considered known semiclassical and phenomenology models for one- and multilayered film systems, results of their testing are resulted and the degree of conformity of calculate and experimental results is specified. It is drawn a conclusion on significant role of deformation effects which account gives satisfactory conformity with experimental data. A question which has been least studied of physics thin films about temperature dependence of coefficients longitudinal and transverse tensosensibility was analized. Are resulted numerous experimental results which corresponded theoretical conclusions. Different aspects of practical application of film materials as sensitive elements of strain sensors are analysed. When you are citing the document, use the following link http://essuir.sumdu.edu.ua/handle/123456789/1678