publication . Article . 2011

Silicon sensor development for the CMS tracker upgrade

G. Auzinger; G. Auzinger;
Open Access
  • Published: 13 Oct 2011 Journal: Journal of Instrumentation, volume 6, pages P10010-P10010 (eissn: 1748-0221, Copyright policy)
  • Publisher: IOP Publishing
CMS started a campaign to identify the future silicon sensor technology baseline of the new tracker for the high-luminosity phase of LHC. We ordered a large variety of 6 inch wafers in different thicknesses and technologies at producer Hamamatsu. Thicknesses ranging from 50 microns to 300 microns are explored on Floatzone, Magnetic Czochralski and Epitaxial Silicon both in n-in-p and p-in-n versions. P-stop and p-spray are explored as isolation technologies for the n-in-p type sensors as well as the feasibility of double metal routing on 6 inch wafers. Each wafer contains many different structures to answer different questions, e.g. geometry, Lorentz angle, radi...
Persistent Identifiers
free text keywords: Instrumentation, Mathematical Physics, Optoelectronics, business.industry, business, Semiconductor detector, Pixel, Silicon, chemistry.chemical_element, chemistry, Ranging, Large Hadron Collider, Wafer, Physics, Diode, Upgrade
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