research data . Dataset . 2017

Diamond waveguides fabricated by reactive ion etching

Hiscocks, Mark P.; Ganesan, Kumaravelu; Gibson, Brant C.; Huntington, Shane T.; Ladouceur, François; Prawer, Steven;
  • Published: 28 Apr 2017
  • Publisher: Figshare
Abstract
We demonstrate for the first time the feasibility of all-diamond integrated optic devices over large areas using a combination of photolithography, reactive ion etching (RIE) and focused ion beam (FIB) techniques. We confirm the viability of this scalable process by demonstrating guidance in a two-moded ridge waveguide in type 1b single crystal diamond. This opens the door to the fabrication of a diamond-based optical chip integrating functional elements such as X-crossings, Y-junctions, evanescent couplers
Subjects
free text keywords: Biophysics, Space Science, 29999 Physical Sciences not elsewhere classified, Genetics, Molecular Biology, Biotechnology, 39999 Chemical Sciences not elsewhere classified, Plant Biology
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figshare
Dataset . 2017
Provider: Datacite
figshare
Dataset . 2017
Provider: Datacite
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