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Software Package Application for Self-consistent Processing of X-ray Measurement Data for Studying Structural Properties and Parameters of Objects

descriptionPublicationkeyboard_double_arrow_right Article 30 Oct 2020Publisher:Blue Eyes Intelligence Engineering and Sciences Engineering and Sciences Publication - BEIESPJournal:International Journal of Innovative Technology and Exploring Engineering, volume 9, pages 154-158 (eissn: 2278-3075,

Authors: Medetov N.A.; Petrakov D.S.; Gerasimenko N.N; Suyundukov R.A.;

doi: 10.35940/ijitee.l7891.1091220

Software Package Application for Self-consistent Processing of X-ray Measurement Data for Studying Structural Properties and Parameters of Objects

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Abstract

The article presents the results of TiN diffusion-barrier layers studies on a silicon substrate, carried out with the use of the copyrighted software package. In this paper, it is proposed to use several methods for studying the structures and combine them in the form of an integrated approach, which allows not only to increase the calculation accuracy but also to solve most of the arisen problems. Based on this approach, an automated software package for X-ray spectral and X-ray structural analysis was developed to study the elemental and phase composition of the objects, including the analysis of ore minerals, which allows not only to obtain a more complete and detailed picture of the studied objects, but also to increase the sensitivity threshold detection of individual elements that are not detected by individual methods of analysis.

Keywords

automated system, X-ray research methods, nanoelectronics, X-ray reflectometry, refractometry, diffuse scattering.

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