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Frontiers in Nanotechnology
Article . 2023 . Peer-reviewed
License: CC BY
Data sources: Crossref
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Frontiers in Nanotechnology
Article . 2023
Data sources: DOAJ
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Non-thermal regimes of laser annealing of semiconductor nanostructures: crystallization without melting

Authors: Inam Mirza; Alexander V. Bulgakov; Hanna Sopha; Hanna Sopha; Sergey V. Starinskiy; Sergey V. Starinskiy; Hana Turčičová; +9 Authors

Non-thermal regimes of laser annealing of semiconductor nanostructures: crystallization without melting

Abstract

As-prepared nanostructured semiconductor materials are usually found in an amorphous form, which needs to be converted into a crystalline one for improving electronic properties and achieving enhanced application functionalities. The most utilized method is thermal annealing in a furnace, which however is time- and energy-consuming and not applicable for low-temperature melting substrates. An alternative is laser annealing, which can be carried out in a relatively short time and, additionally, offers the possibility of annealing localized areas. However, laser-annealed nanostructures are often distorted by melting, while preserving the as-prepared morphology is essential for practical applications. In this work, we analyze conditions of non-thermal ultrafast laser annealing of two kinds of nanostructures: anodic TiO2 nanotube layers and Ge/Si multilayer stacks. For both cases, regimes of crystallization have been found, which yield in preserving the initial nanomaterial morphologies without any melting signs. On these examples, ultrafast non-thermal mechanisms of structural material transformation are discussed, which can provide new opportunities for conversion of amorphous semiconductor nanomaterials into a desired crystalline form that is of high demand for existing and emerging technologies.

Keywords

multilayer nanofilms, Chemical technology, ultrashort laser pulses, amorphous titania nanotubes, stress waves, TP1-1185, non-thermal processes, laser-induced crystallization

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selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
5
Top 10%
Average
Top 10%
gold