publication . Article . 2018

INITIAL DEFORMATION OF SINX/AL CANTILEVERS ACCORDING TO THERMAL BUDGET FOR MEMS SENSORS

G. A. Rudakov; R. Z. Khafizov;
Open Access
  • Published: 01 Aug 2018 Journal: Journal of the Russian Universities. Radioelectronics (issn: 1993-8985, Copyright policy)
  • Publisher: St. Petersburg Electrotechnical University LETI
Abstract
Mechanical  properties of MEMS devices  are specified  by their structure and  process  parameters, such as temperature, films thickness, deposition conditions, etc. These features, in particular,  the deposition temperature and post deposition treatments, determine the residual stress in the films, which affect the initial deformation, stability of parameters, sensitivity and reliability. Prediction, control and minimization of residual stress are an important part of the structural and technological design  of MEMS devices.  The effect  of post  deposition thermal treatment on  the  residual  mechanical stress  of SiNx, Al and SiNx/Al films is studied. It is s...
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free text keywords: bilayer cantilever, sinx/al, residual stress, initial deformation, mems ir sensors, Cantilever, Deformation (mechanics), Materials science, Optoelectronics, business.industry, business, Thermal, Mems sensors, lcsh:Electronics, lcsh:TK7800-8360
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