publication . Article . 2019

Control of Electrical and Optical Parameters of Humidity Sensors Active Elements Based on Tin Oxides Films with Variable Composition

Д. B. Адамчук;
Open Access
  • Published: 24 Jun 2019 Journal: Devices and Methods of Measurements, volume 10, pages 138-150 (issn: 2220-9506, eissn: 2414-0473, Copyright policy)
  • Publisher: Belarusian National Technical University
Abstract
The aim of this work is development of technique for synthesis of tin oxides films with various stoichiometric composition, characterized by high electrical conductivity and light transmittance in the UV and visible range of the electromagnetic spectrum, for their further application as humidity and gas sensors, as well as electrodes for electro-and photocatalytic converters.Nonstoichiometric SnO/SnO2 /SnO2−δ films were synthesized by reactive magnetron sputtering of tin onto glass substrates in argon plasma with oxygen addition and with subsequent thermal oxidation of the formed layers in air. To change the structural, optical, and electrical properties of the ...
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Subjects
free text keywords: Electrical resistance and conductance, Annealing (metallurgy), Tin dioxide, chemistry.chemical_compound, chemistry, Tin, chemistry.chemical_element, Argon, Materials science, Sputtering, Thermal oxidation, Analytical chemistry, Tin oxide
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