publication . Article . 2016

STATIC AND DYNAMIC STABILITY OF GRAVI-INERTIAL SENSORS WITH CAPACITIVE DIFFERENTIAL SYSTEM OF SENSITIVITY ADJUSTMENT

Open Access
  • Published: 01 Jun 2016 Journal: Devices and Methods of Measurements, volume 7, pages 16-23 (issn: 2220-9506, eissn: 2414-0473, Copyright policy)
  • Publisher: Belarusian National Technical University
  • Country: Belarus
Abstract
The design of a gravi-inertial sensor with an elastically suspended sensing mass exhibiting a maximum sensitivity and minimum noise level is being studied. It is conceived that such a sensor contains a torsion mass-spring system, a capacitive pick-off circuit to detect motions of the sensing mass, and a capacitive system to reduce torsion stiffness. Both capacitive systems are combined into a single differential capacitance electrostatic system. The torsion stiffness is reduced by applying an electric field. Problems resulting from the electrostatic asymmetry of the differential system are studied analytically and numerically. The quasi-static and dynamic modes ...
Subjects
free text keywords: gravi-inertial sensors, capacitive differential sensor, pull-in effect, asymmetry of a differential sensor, Гравиинерциальные датчики, Дифференциальный сенсор - емкостной, Эффект залипания, Дифференциальный сенсор - асимметрия, Control theory, Asymmetry, media_common.quotation_subject, media_common, Electrostatic units, Mechanics, Oscillation, Differential capacitance, Chemistry, Capacitive sensing, Proof mass, Torsion (mechanics), Electric field, lcsh:Engineering (General). Civil engineering (General), lcsh:TA1-2040
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