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Article . 2014 . Peer-reviewed
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Long-Stroke Nanopositioning Stage Driven by Piezoelectric Motor

Authors: Yong Wang; Fujun Sun; Junhui Zhu; Ming Pang; Changhai Ru;

Long-Stroke Nanopositioning Stage Driven by Piezoelectric Motor

Abstract

This paper reported a biaxial nanopositioning stage single-driven by piezoelectric motor. The employed piezoelectric motor can perform two different driving modes, namely, AC drive mode to drive in long-stroke and at high-speed and DC scanning mode with the high-resolution of several nanometers, which satisfies the requirements of both long-stroke and nanoresolution. To compensate for the effects of the variable friction force and some unpredictable disturbances, a novel backward error compensation (BEC) positioning control method integrated of the two driving modes and a double closed-loop PID controller system are proposed to obtain a high-accuracy positional motion. The experiment results demonstrate that the nanopositioning stage with large travel range of 300 mm × 300 mm has a fine speed characteristic and resolution is 5 nm. In the experiments of different travels up to 15 mm, calibrated by a commercial laser vibrometer, the positioning accuracy is proved within 55 nm inx-axis and 40 nm iny-axis with standard deviation less than 40 nm inx-axis and 30 nm iny-axis and the final position locking can be limited to 10 nm, meeting the requirements of micromanipulation technology.

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selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
8
Top 10%
Average
Average
gold