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image/svg+xml Jakob Voss, based on art designer at PLoS, modified by Wikipedia users Nina and Beao Closed Access logo, derived from PLoS Open Access logo. This version with transparent background. http://commons.wikimedia.org/wiki/File:Closed_Access_logo_transparent.svg Jakob Voss, based on art designer at PLoS, modified by Wikipedia users Nina and Beao ECS Transactionsarrow_drop_down
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ECS Transactions
Article . 2010 . Peer-reviewed
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The Mechanism of Over-Etch in Poly-Gate Etching

descriptionPublicationkeyboard_double_arrow_right Article 23 Nov 2010Publisher:The Electrochemical SocietyJournal:ECS Transactions, volume 27, pages 743-748 (issn: 1938-5862, eissn: 1938-6737, Copyright policy )
Authors: Xia Yang; Baoquan Wang; Bing Li; Weifeng Yang; Tao Xing; Qingzhao Zhang;

doi: 10.1149/1.3360704

The Mechanism of Over-Etch in Poly-Gate Etching

Abstract

The over-etch mechanism in poly-gate etching is investigated. The relationships between the final poly-gate profile and the over-etch process parameters are presented. The oxygen flow and temperature of electrostatic chuck (ESC) both sensitively contribute to the notch of the poly-gate profile. Two corresponding process models are suggested.

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citations
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
1
Average
Average
Average
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