
doi: 10.1121/1.411837
An ultrasonic linear motor including a traveling member having a columnar leg portion abutting at its one end against a traveling surface, and a piezoelectric element mounted on the traveling member for vibrating the leg portion in a direction intersecting an axis of the leg portion. A cover is provided around the traveling member for covering the traveling member and a protecting member is filled inside the cover in such a manner as to fully cover the piezoelectric element for protecting the piezoelectric element from an external environment, whereby the piezoelectric element can be protected from the external environment, and the separation of the piezoelectric element from the traveling member can be prevented. In another aspect, a protector cover is mounted on the traveling member in such a manner as to extend forwardly beyond the piezoelectric element in a direction of movement of the traveling member, whereby even when the protector cover collides with an external member, the damage of the piezoelectric element can be prevented.
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