MEMS actuator and relay with horizontal actuation

descriptionPublicationkeyboard_double_arrow_right Article , Journal 01 Jan 2010 English Publisher:Acoustical Society of America (ASA)Journal:The Journal of the Acoustical Society of America, volume 127, page 2,705 (issn: 0001-4966,

Authors: Roozbeh Parsa; Peter J. Hopper; Trevor Niblock;

doi: 10.1121/1.3396193

MEMS actuator and relay with horizontal actuation

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Abstract

A micro-electromechanical (MEMS) actuator and relay are implemented using a copper coil and a magnetic core. The magnetic core includes a base section that lies within the copper coil, and a cantilever section that lies outside of the copper coil. The presence of a magnetic field in the coil causes the cantilever section to move horizontally away from a rest position, while the absence of the magnetic field allows the cantilever section to return to the rest position.

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National Semiconductor
United States

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