
doi: 10.1117/12.721985
handle: 20.500.14243/69278
A 1D photonic crystal slab based on preferential etching of commercially available silicon-on-insulator wafers is presented. Compared to dry etching, anisotropic wet etching is more tolerant to errors as it is self-stopping on crystallographic {111} planes and it produces a more precise geometry with symmetries and homothetic properties, with surface roughness close to 1 nm. The resulting grooves are infiltrated by low viscosity liquid crystal having large positive optical anisotropy. The use of slanted grooves provides advantages: first of all the complete filling of slanted grooves is simplified when compared to vertical walls structures. Furthermore alignment is significantly facilitated. Indeed the liquid crystal molecules tend to align with their long axis along the submicron grooves. Therefore by forcing reorientation out of a rest position, the liquid crystal presents a choice of refractive indices to the propagating optical field. The liquid crystal behavior is simulated by a finite element method, and coupled to a finite difference time domain method. We investigate different photonic crystal configurations. Large tunability of bandgap edge for TE polarization is demonstrated when switching the liquid crystal with an applied voltage. We have also studied the use of the same device geometry as a very compact microfluidic refractometric sensor.
silicon micromachining, refractometric sensor, liquid crystals, 620 Ingegneria e attivita' affini, tunable filter, 535, Photonic crystal
silicon micromachining, refractometric sensor, liquid crystals, 620 Ingegneria e attivita' affini, tunable filter, 535, Photonic crystal
| selected citations These citations are derived from selected sources. This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically). | 1 | |
| popularity This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network. | Average | |
| influence This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically). | Average | |
| impulse This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network. | Average |
