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Vacuum Packaged Micromachined Gyroscope

descriptionPublicationkeyboard_double_arrow_right Article 01 Jan 2006Publisher:IEEEJournal:2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems
Authors: Anping Qiu; Yan Su; Qin Shi; Bo Yang; Yishen Xu;

doi: 10.1109/nems.2006.334769

Vacuum Packaged Micromachined Gyroscope

Abstract

In this paper, we present work on the design, fabrication, readout technique and vacuum packaging of z-axis gyroscopes. A vacuum package that houses the gyroscope and its control electronics has bee built and tested. The entire gyroscope package including control electronics is approximately phi42 times 24mm in dimensions. This vacuum packaged gyroscope has a scale factor of 19.8mV/deg/sec with a linear error less than 0.7% for the range of plusmn200deg/s, bias stability of 20deg/hr

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selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
6
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