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Micro Milling Technologies for MEMS

Authors: Jinsheng Wang; Yadong Gong; Garbriel Abba; Jianfeng Cao; Jiashun Shi; Guangqi Cai;

Micro Milling Technologies for MEMS

Abstract

In this paper, a comprehensive introduction of micro milling technology, which is a novel micro-manufacturing technology to fabricate many materials with complex 3D and high aspect ratio structure, is presented. Compared with some other micro-manufacturing technologies, micro milling has a lot of merits, such as low cost, flexibility. The machine tool, micro mills, and monitoring devices are the key technologies, and the micro milling principles with attention to minimum chip thickness and workpiece microstructure influences are presented primarily. At last, our research in micro milling field is given.

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    7
    popularity
    This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
    Average
    influence
    This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
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    impulse
    This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
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Powered by OpenAIRE graph
Found an issue? Give us feedback
selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
7
Average
Top 10%
Average
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