publication . Article . 2012

Tilted $c$-Axis Thin-Film Bulk Wave Resonant Pressure Sensors With Improved Sensitivity

Emil Anderås; Ilia Katardjiev; Ventsislav Yantchev;
Open Access
  • Published: 13 Jun 2012 Journal: IEEE Sensors Journal, volume 12, pages 2,653-2,654 (issn: 1530-437X, eissn: 1558-1748, Copyright policy)
  • Publisher: Institute of Electrical and Electronics Engineers (IEEE)
  • Country: Sweden
Abstract
Aluminum nitride thin-film bulk wave resonant pressure sensors employing c- and tilted c-axis texture, have been fabricated and tested for their pressure sensitivities. The c-axis tilted film bulk acoustic resonators pressure sensors demonstrate substantially higher-pressure sensitivity compared to its c-axis oriented counterpart. More specifically, the thickness plate quasi-shear resonance has demonstrated the highest pressure sensitivity while further being able to preserve its performance in liquid environment.
Persistent Identifiers
Subjects
arXiv: Condensed Matter::Materials Science
free text keywords: AlN, FBAR, pressure sensor, sensitivity, micro-acoustic, Other Electrical Engineering, Electronic Engineering, Information Engineering, Annan elektroteknik och elektronik, Materials science, Optoelectronics, business.industry, business, Aluminium, chemistry.chemical_element, chemistry, Pressure sensor, Thin film, Nitride, Pressure measurement, law.invention, law, Resonance, Resonator, Electrical engineering, Uniaxial crystal
Related Organizations

[1] K.-H. Chiu, H.-R. Chen, and S. R.-S. Huang, “High-Performance Film Bulk Acoustic Wave Pressure and Temperature Sensors,” Jpn. J. Appl. Phys. Vol. 46, pp. 1392-1397, 2007.

[2] E. Anderås; I. Katardjiev, V.Yantchev, "Lamb wave resonant pressure micro-sensor utilizing a thin-film aluminum nitride membrane ", J. Micromech. Microeng., Vol. 21( 8), 85010-85016, Aug. 2011

[3] M. Penza, P. Aversa, G. Cassano, D. Suriano, W. Wlodarski, M. Benetti, D. Cannata, F. Di Pietrantonio, E. Verona, “Thin-Film BulkAcoustic-Resonator Gas Sensor Functionalized With a Nanocomposite Langmuir-Blodgett Layer of Carbon Nanotubes”, IEEE Trans. Electron Dev., Vol. 55 (5), pp. 1237 - 1243, 2008

[4] J. Bjurstrom, D. Rosén, I. Katardjiev, V. Yantchev and I. Petrov, "Dependence of the electromechanical coupling on the degree of orientation of C-textured thin AlN films", IEEE Trans. On UFFC, Vol. 51, No. 10, pp. 1347 - 1353, Oct. 2004

[5] M. Nirschl, A. Rantala, K. Tukkiniemi, S. Auer, A. Hellgren, D. Pitzer, M. Schreiter and I. Vikholm-Lundin, “CMOS-Integrated Film Bulk Acoustic Resonators for Label-Free Biosensing”, Sensors Vol. 10, No. 5, pp. 4180-4193, 2010

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