
To meet the need of advanced manufacturing technology, a piezoelectric actuator with high resolution was developed in this work. The principle of exciting the driving tip to vibrate elliptically was analyzed in detail. A prototype was fabricated to validate the analysis. Testing results shows that this prototype can obtain a speed of 16.6mm/sec in the sinuous exciting voltage signal with peak to peak value 100V, 50V offset and frequency 5.5 kHz. By adopting stacked piezoelectric ceramics, this motor has a stable output performance over a wide range of exciting sinuous voltage signal. Besides, this piezoelectric motor also has high resolution due to quasi-static operation mode.
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