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Parasitic capacitance modeling for multilevel interconnects

Authors: Sadahiro Tani; Yoshihiro Uchida; Makoto Furuie; Shuji Tsukiyama; BuYeol Lee; Shuji Nishi; Yasushi Kubota; +2 Authors

Parasitic capacitance modeling for multilevel interconnects

Abstract

The problem of calculating parasitic capacitance between interconnects is investigated with the main theme focused on deriving approximate expressions for calculating parasitic capacitance between two crossing interconnects. The interconnects are divided into a few basic coupling regions, in such a way that the capacitance in a region can be represented by a simple expression adjusted to the results computed by an electromagnetic field solver based on a two-dimensional capacitance model. An approximate expression of the total capacitance between two crossing interconnects is obtained by summing the capacitances in all regions. In order to evaluate the accuracy of this approximation, the capacitance calculated by the attained expression is compared with the one obtained by a three-dimensional field solver, and it turns out that the error is less than 5%.

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Powered by OpenAIRE graph
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selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
3
Average
Average
Average
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