publication . Article . 2020

Wafer-scale graphene quality assessment using micro four-point probe mapping

David M. A. Mackenzie; Kristoffer Gram Kalhauge; Patrick Rebsdorf Whelan; Frederik W Østergaard; Iwona Pasternak; Wlodek Strupinski; Peter Bøggild; Peter Uhd Jepsen; Dirch Hjorth Petersen;
Open Access
  • Published: 13 Mar 2020
Abstract
| openaire: EC/H2020/785219/EU//GrapheneCore2 Micro four-point probes (M4PP) provide rapid and automated lithography-free transport properties of planar surfaces including two-dimensional materials. We perform sheet conductance wafer maps of graphene directly grown on a 100 mm diameter SiC wafer using a multiplexed seven-point probe with minor additional measurement time compared to a four-point probe. Comparing the results of three subprobes we find that compared to a single-probe result, our measurement yield increases from 72%-84% to 97%. The additional data allows for correlation analysis between adjacent subprobes, that must measure the same values in case ...
Persistent Identifiers
Subjects
free text keywords: Electrical and Electronic Engineering, Mechanical Engineering, Mechanics of Materials, General Materials Science, General Chemistry, Bioengineering, Graphene, SiC, Conductance, Micro four-point probes, Terahertz spectroscopy,, Metrology, Mapping, micro four-point probe, terahertz spectroscopy, Terahertz spectroscopy and technology, Materials science, Conductance, Wafer, Optoelectronics, business.industry, business, Terahertz radiation, Electrode, Graphene, law.invention, law, Metrology, Spectroscopy
Funded by
EC| GrapheneCore2
Project
GrapheneCore2
Graphene Flagship Core Project 2
  • Funder: European Commission (EC)
  • Project Code: 785219
  • Funding stream: H2020 | SGA-RIA
Validated by funder
,
EC| 3DAM
Project
3DAM
3D Advanced Metrology and materials for advanced devices
  • Funder: European Commission (EC)
  • Project Code: 692527
  • Funding stream: H2020 | ECSEL-RIA
,
EC| Car2TERA
Project
Car2TERA
Terahertz sensors and networks for next generation smart automotive electronic systems
  • Funder: European Commission (EC)
  • Project Code: 824962
  • Funding stream: H2020 | RIA
Validated by funder
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