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Symmetric differential capacitive pressure sensor

Authors: Randall D. Peters;

Symmetric differential capacitive pressure sensor

Abstract

Differential capacitive sensors are common to pressure gauges. Previous sensors of the bridge type have utilized only two variable (active) components, resulting in a half-bridge electrical equivalent circuit. There are numerous advantages of a symmetric full bridge, using four active components. The symmetry improves linearity and increases signal to noise ratio, especially when supported by electronics based on synchronous detection. Another advantage of symmetry is invariance to scaling, through immunity to stray capacitance. This feature is especially important in relationship to the current trend toward micro-electro-mechanical systems. A crude, inexpensive, macroscopic prototype of the present design was built with attention to high sensitivity. Constructed with a thin aluminized Mylar diaphragm, this device can readily resolve pressure changes smaller than 10−2 Pa.

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selected citations
These citations are derived from selected sources.
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
17
Average
Top 10%
Average
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