Abstract This paper presents a new approach to predict the internal state of piezo driven (consisting of diaphragm and piezoelectric disc) diffuser/nozzle micropump at any instant of time. The dynamic performance is evaluated considering the damping effect. Analysis results show that, the natural frequency of the micropump is found to deteriorate when the damping factor is considered. The model is developed to predict the actuator displacement, flow velocity characteristics, flow rate and backpressure for different input frequencies using MATLAB. The validity of the proposed model is evaluated by comparing the simulation results in MATLAB with the experimental results.