The influence of the substrate thermal conductivity on scanning thermochemical lithography

Article English CLOSED
Tolk, Marten; Fenwick, Oliver; Ahmad, Sadi; Cacialli, Franco;
(2012)
  • Publisher: AMER INST PHYSICS
  • Journal: JOURNAL OF APPLIED PHYSICS (issn: 0021-8979)
  • Related identifiers: doi: 10.1063/1.4729809
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