Impacts of Doping on Epitaxial Germanium Thin Film Quality and Si-Ge Interdiffusion

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Zhou, Guangnan; Lee, Kwang Hong; Anjum, Dalaver H.; Zhang, Qiang; Zhang, Xixiang; Tan, Chuan Seng; Guangrui; Xia;
  • Subject: Condensed Matter - Materials Science

Ge-on-Si structures with three different dopants (P, As and B) and those without intentional doping were grown and annealed. Several different materials characterization methods have been performed to characterize the Ge film quality. All samples have a smooth surface (... View more
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