Waferscale Electrostatic Quadrupole Array for Multiple Ion Beam Manipulation
Vinayakumar, K. B.
Seidl, P. A.
Waldron, W. L.
Physics - Accelerator Physics
arxiv: Physics::Accelerator Physics
We report on the first through-wafer silicon-based Electrostatic Quadrupole Array (ESQA) to focus high energy ion beams. This device is a key enabler for a wafer based accelerator architecture that lends itself to orders-of-magnitude reduction in cost, volume and weight...