publication . Preprint . 2018

Waferscale Electrostatic Quadrupole Array for Multiple Ion Beam Manipulation

Vinayakumar, K. B.; Persaud, A.; Seidl, P. A.; Ji, Q.; Waldron, W. L.; Schenkel, T.; Ardanuc, S.; Lal, A.;
Open Access English
  • Published: 07 Feb 2018
Abstract
We report on the first through-wafer silicon-based Electrostatic Quadrupole Array (ESQA) to focus high energy ion beams. This device is a key enabler for a wafer based accelerator architecture that lends itself to orders-of-magnitude reduction in cost, volume and weight of charged particle accelerators. ESQs are a key building block in developing compact Multiple Electrostatic Quadrupole Array Linear Accelerator (MEQALAC) [1]. In a MEQALAC electrostatic forces are used to focus ions, and electrostatic field scaling permits high beam current densities by decreasing the beam aperture size for a given peak electric field set by breakdown limitations. Using multiple...
Subjects
arXiv: Physics::Accelerator Physics
free text keywords: Physics - Accelerator Physics
Related Organizations

[1] Maschke, A. W. Space-charge limits for linear accelerators. No. BNL-51022. Department of Energy [Office of Energy Research], Brookhaven National Laboratory, Accelerator Department, 1979. [OpenAIRE]

[2] Hamm, Robert Wray, and Marianne Elizabeth Hamm, eds. Industrial accelerators and their applications. World Scientific, 2012.

[3] Ji, Q., P. A. Seidl, W. L. Waldron, J. H. Takakuwa, A. Friedman, D. P. Grote, A. Persaud, J. J. Barnard, and T. Schenkel. "Development and testing of a pulsed helium ion source for probing materials and warm dense matter studies." Review of Scientific Instruments 87, no. 2 (2016): 02B707.

[4] Vinayakumar, K. B., V. Gund, N. Lambert, S. Lodha, and A. Lal. "Enhanced lithium niobate pyroelectric ionizer for chip-scale ion mobility-based gas sensing." In SENSORS, 2016 IEEE, pp. 1-3. IEEE, 2016. [OpenAIRE]

[5] Cheung, Kerry, Luis Fernando Velasquez-Garcia, and Akintunde Ibitayo Akinwande. "Chip-scale quadrupole mass filters for portable mass spectrometry." Journal of Microelectromechanical Systems 19, no. 3 (2010): 469-483.

[6] Syms, Richard RA, Thomas J. Tate, Munir M. Ahmad, and Stephen Taylor. "Design of a microengineered electrostatic quadrupole lens." IEEE Transactions on Electron Devices 45, no. 11 (1998): 2304-2311.

[7] Harrison, Jere, Yongha Hwang, Omeed Paydar, Jimmy Wu, Evan Threlkeld, James Rosenzweig, Pietro Musumeci, and Rob Candler. "High-gradient microelectromechanical system quadrupole electromagnets for particle beam focusing and steering." Physical Review Special TopicsAccelerators and Beams 18, no. 2 (2015): 023501.

[8] Shi, Yue, Serhan Ardanuç, and Amit Lal. "MicroEinzel lens for wafer-integrated electron beam actuation." In Micro Electro Mechanical Systems (MEMS), 2013 IEEE 26th International Conference on, pp. 189-192. IEEE, 2013

[9] Persaud, A., Q. Ji, E. Feinberg, P. A. Seidl, W. L. Waldron, T. Schenkel, A. Lal, K. B. Vinayakumar, S. Ardanuc, and D. A. Hammer. "A compact linear accelerator based on a scalable microelectromechanical-system RF-structure" Review of Scientific Instruments 88, no. 6 (2017): 063304.

[10] Persaud, A., P. A. Seidl, Q. Ji, E. Feinberg, W. L. Waldron, T. Schenkel, S. Ardanuc, K. B. Vinayakumar, and A. Lal. "Staging of RF-accelerating units in a MEMS-based ion accelerator" Physics Procedia, Volume 90, 2017, 136-142, 10.1016/j.phpro.2017.09.040, arXiv:1702.00460 (2017). [OpenAIRE]

[11] Gund, V., A. Ruyack, A. Leonardi, K. B. Vinayakumar, C. K. Ober, and A. Lal. "Individually detachable polymer-silicon micro-parts for vaporizable electronics." In Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2017 19th International Conference on, pp. 686-689. IEEE, 2017. [OpenAIRE]

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