Waferscale Electrostatic Quadrupole Array for Multiple Ion Beam Manipulation
PreprintEnglishOPEN
Vinayakumar, K. B.
;
Persaud, A.
;
Seidl, P. A.
;
Ji, Q.
;
Waldron, W. L.
;
Schenkel, T.
;
Ardanuc, S.
;
Lal, A.
(2018)
Subject: Physics - Accelerator Physics
arxiv: Physics::Accelerator Physics
We report on the first through-wafer silicon-based Electrostatic Quadrupole Array (ESQA) to focus high energy ion beams. This device is a key enabler for a wafer based accelerator architecture that lends itself to orders-of-magnitude reduction in cost, volume and weight...
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