Waferscale Electrostatic Quadrupole Array for Multiple Ion Beam Manipulation

Preprint English OPEN
Vinayakumar, K. B.; Persaud, A.; Seidl, P. A.; Ji, Q.; Waldron, W. L.; Schenkel, T.; Ardanuc, S.; Lal, A.;
(2018)
  • Subject: Physics - Accelerator Physics
    arxiv: Physics::Accelerator Physics

We report on the first through-wafer silicon-based Electrostatic Quadrupole Array (ESQA) to focus high energy ion beams. This device is a key enabler for a wafer based accelerator architecture that lends itself to orders-of-magnitude reduction in cost, volume and weight... View more
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