Waferscale Electrostatic Quadrupole Array for Multiple Ion Beam Manipulation

Preprint English OPEN
Vinayakumar, K. B. ; Persaud, A. ; Seidl, P. A. ; Ji, Q. ; Waldron, W. L. ; Schenkel, T. ; Ardanuc, S. ; Lal, A. (2018)
  • Subject: Physics - Accelerator Physics
    arxiv: Physics::Accelerator Physics

We report on the first through-wafer silicon-based Electrostatic Quadrupole Array (ESQA) to focus high energy ion beams. This device is a key enabler for a wafer based accelerator architecture that lends itself to orders-of-magnitude reduction in cost, volume and weight... View more
Share - Bookmark