publication . Preprint . Article . 2013

Critical Temperature Tuning of Ti/TiN Multilayer Films Suitable for Low Temperature Detectors

angelo nucciotti; Elena Ferri; Andrea Giachero; Renato Mezzena; Paolo Falferi; Marco Faverzani;
Open Access English
  • Published: 14 Jul 2013
We present our current progress on the design and test of Ti/TiN multilayer for use in kinetic inductance detectors. Sensors based on sub-stoichiometric TiN film are commonly used in several applications. However, it is difficult to control the targeted critical temperature \(T_c\), to maintain precise control of the nitrogen incorporation process and to obtain a production uniformity. To avoid these problems we investigated multilayer Ti/TiN films that show a high uniformity coupled with high quality factor, kinetic inductance and inertness of TiN. These features are ideal to realize superconductive microresonator detectors for astronomical instruments applicat...
free text keywords: Condensed Matter - Superconductivity, Physics - Instrumentation and Detectors, General Materials Science, Atomic and Molecular Physics, and Optics, Condensed Matter Physics
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