Silicon Nanowires, Catalytic Growth and Electrical Characterization

Preprint English OPEN
Weber, Walter M.; Duesberg, Georg S.; Graham, Andrew P.; Liebau, Maik; Unger, Eugen; Cheze, Caroline; Geelhaar, Lutz; Lugli, Paolo; Riechert, Henning; Kreupl, Franz;
(2006)

Nominally undoped silicon nanowires (NW) were grown by catalytic chemical vapor deposition. The growth process was optimized to control the NWs diameters by using different Au catalyst thicknesses on amorphous SiO2, Si3N4, or crystalline-Si substrates. For SiO2 substrat... View more
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