Nanomechanical resonant structures in single-crystal diamond
Burek, Michael J.
Frank, Ian W.
Condensed Matter - Mesoscale and Nanoscale Physics
With its host of outstanding material properties, single-crystal diamond is an attractive material for nanomechanical systems. Here, the mechanical resonance characteristics of freestanding, single-crystal diamond nanobeams fabricated by an angled-etching methodology ar...