publication . Other literature type . Article . Preprint . 2013

Nanomechanical resonant structures in single-crystal diamond

Parth Patel; Marko Loncar; Michael J. Burek; Daniel Ramos; Ian W. Frank;
Open Access
  • Published: 23 Sep 2013
  • Publisher: AIP Publishing
With its host of outstanding material properties, single-crystal diamond is an attractive material for nanomechanical systems. Here, the mechanical resonance characteristics of freestanding, single-crystal diamond nanobeams fabricated by an angled-etching methodology are reported. Resonance frequencies displayed evidence of significant compressive stress in doubly clamped diamond nanobeams, while cantilever resonance modes followed the expected inverse-length-squared trend. Q-factors on the order of 104 were recorded in high vacuum. Results presented here represent initial groundwork for future diamond-based nanomechanical systems which may be applied in both cl...
free text keywords: Physics and Astronomy (miscellaneous), Condensed Matter - Mesoscale and Nanoscale Physics, Diamond, engineering.material, engineering, Ultra-high vacuum, Optoelectronics, business.industry, business, Nanotechnology, Nanomechanics, Cantilever, Material properties, Mechanical resonance, Q factor, Resonance, Materials science
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