publication . Article . Preprint . 2016

Suspended graphene variable capacitor

M. AbdelGhany; Farzaneh Mahvash; M. Mukhopadhyay; Alexandre Favron; Richard Martel; Mohamed Siaj; Thomas Szkopek;
Open Access
  • Published: 14 Apr 2016 Journal: 2D Materials, volume 3, page 41,005 (eissn: 2053-1583, Copyright policy)
  • Publisher: IOP Publishing
Electromechanical variable capacitors, or varactors, find a wide range of applications including sensing applications and the tuning of electrical circuit resonance. We demonstrate a nano-electromechanical graphene varactor, a variable capacitor wherein the capacitance is tuned by voltage controlled deflection of a dense array of suspended graphene membranes. The low flexural rigidity of graphene monolayers is exploited to achieve low actuation voltage and high tunable capacitance density in an ultra-thin structure. Large arrays comprising thousands of suspensions were fabricated to give a tunable capacitance of over 10 pF mm−2. This capacitance density suggests...
Persistent Identifiers
free text keywords: Mechanical Engineering, General Materials Science, Mechanics of Materials, General Chemistry, Condensed Matter Physics, Condensed Matter - Mesoscale and Nanoscale Physics, Varicap, Capacitor, law.invention, law, Monolayer, Capacitance, Variable capacitor, Microelectromechanical systems, Voltage, Graphene, Physics, Optoelectronics, business.industry, business, Nanotechnology
Funded by
  • Funder: Natural Sciences and Engineering Research Council of Canada (NSERC)
41 references, page 1 of 3

y [1] Korda, D. Elektrischer kondensator mit durch lagen-

Patentamt 72447 led 8 June 1892, and issued 13 Decem-

ber 1893. [2] Barnes, S. H., Oaks, J. E. & Mann, J. E. Voltage sen-

sitive semiconductor capacitor, US Patent 2,989,671 led

23 May 1958, and issued 20 June 1961. [3] Larson, L. E. Microwave mems technology for next-

posium Digest, 1999 IEEE MTT-S International, vol. 3,

1073{1076 (1999). [4] Rebeiz, G. M. RF MEMS: Theory, Design, and Technol-

ogy (John Wiley & Sons, 2004). [5] Young, D. J. & Boser, B. E. A micromachine-based rf low-

Circuits Conference, 1997., Proceedings of the IEEE 1997,

431{434 (1997). [6] Zhang, B. & Fang, D. Mech Mach Theory 44, 647{655

(2009). [7] Baek, D.-H. et al. Widely tunable variable capacitor with

ters, IEEE 36, 186{188 (2015). [8] AbdelGhany, M., Ledwosinska, E. & Szkopek, T. The-

Letters 101, { (2012). [9] Bunch, J. S. et al. Impermeable atomic membranes from

graphene sheets. Nano Letters 8, 2458{2462 (2008). [10] Chen, C. et al. Graphene mechanical oscillators with tun-

able frequency. Nature Nanotechnology 8, 923{927 (2013). [11] Chen, X. et al. High-speed graphene interconnects mono-

41 references, page 1 of 3
Any information missing or wrong?Report an Issue