The break-through voltage over small gaps has been investigated for differing gap distances, gas pressures, and gas temperatures in nitrogen, neon, argon and xenon gases. A deviation from Paschen's law at micro gap distances has been found. The breakthrough behavior of the fill gas in colder environments was tested as well. A significant shift of the curve relative to the results at room temperature was observed. The results can be explained by combining Paschen's law and the ideal gas law.