Optical displacement measurement with GaAs/AlGaAs-based monolithically integrated Michelson interferometers

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Hofstetter, Daniel; Zappe, H. P.; Dändliker, René;

Two monolithically integrated optical displacement sensors fabricated in the GaAs/AlGaAs material system are reported. These single-chip microsystems are configured as Michelson interferometers and comprise a distributed Bragg reflector (DBR) laser, photodetectors, phas... View more
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