publication . Article . 2008

Optical displacement measurement with GaAs/AlGaAs-based monolithically integrated Michelson interferometers

D. Hofstetter; H.P. Zappe; R. Dandliker;
Open Access
  • Published: 19 May 2008
  • Country: Switzerland
Abstract
Two monolithically integrated optical displacement sensors fabricated in the GaAs/AlGaAs material system are reported. These single-chip microsystems are configured as Michelson interferometers and comprise a distributed Bragg reflector (DBR) laser, photodetectors, phase shifters, and waveguide couplers. While the use of a single Michelson interferometer allows measurement of displacement magnitude only, a double Michelson interferometer with two interferometer signals in phase quadrature also permits determination of movement direction. In addition, through the use of two 90/spl deg/ phase-shifted interferometer signals in the latter device, a phase interpolati...
Subjects
free text keywords: Optics, business.industry, business, Photodetector, Optoelectronics, In-phase and quadrature components, Distributed Bragg reflector, Laser, law.invention, law, Astronomical interferometer, Interferometry, Michelson interferometer, Waveguide, Electronic engineering, Mathematics
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