Dependence of the saturated light-induced defect density on macroscopic properties of hydrogenated amorphous silicon
Park, H. R.
Liu, J. Z.
Roca i Cabarrocas, P.
Abelson, J. R.
We report a study of the saturated light-induced defect density <i>N</i><sub>s,sat</sub> in 37 hydrogenated (and in part fluorinated) amorphous silicon [<i>a</i>-Si:H(F)] films grown in six different reactors under widely different conditions. <i>N</i><sub>s,sat</sub> w...