Dependence of the saturated light-induced defect density on macroscopic properties of hydrogenated amorphous silicon

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Park, H. R.; Liu, J. Z.; Roca i Cabarrocas, P.; Maruyama, A.; Isomura, M.; Wagner, S.; Abelson, J. R.; Finger, F.;
(2008)

We report a study of the saturated light-induced defect density <i>N</i><sub>s,sat</sub> in 37 hydrogenated (and in part fluorinated) amorphous silicon [<i>a</i>-Si:H(F)] films grown in six different reactors under widely different conditions. <i>N</i><sub>s,sat</sub> w... View more
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