publication . Doctoral thesis . 2001

Herstellung und Untersuchung metallischer Einzel-Elektronen-Transistoren

Hofmann, Karl;
Open Access German
  • Published: 01 Jan 2001
  • Publisher: Publikationsserver der RWTH Aachen University
  • Country: Germany
Single-electron transistors (SETs) are quantum devices and are based on the controlling of the Coulomb blockade. They are the ultimate development of low-power devices with an extreme high potential of integration. Their dominant purpose is seen in future memory devices. Usually the key element of all metallic SETs is a tunnel junction consisting of a metal-insulator-metal transition. In this current thesis the microscopic and electrical investigations of e-gun evaporated titanium thin films are presented in detail. Also the properties of TI/TiOX/Ti junction are discussed. Titanium films containing a fiber texture with a grain size of up to 25nm show a decreasin...
free text keywords: Ingenieurwissenschaften, Einelektronen-Tunneleffekt, Transistor, Titan, Titanoxide, Tunnelkontakt, ddc:620
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