Experimental and theoretical study of heterogeneous iron precipitation in silicon

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Haarahiltunen, Antti; Väinölä, Hele; Anttila, O.; Yli-Koski, Marko;
  • Publisher: AIP Publishing
  • Related identifiers: doi: 10.1063/1.2472271
  • Subject: Energy | Physics | Electrical engineering | iron | silicon | heterogeneous iron precipitation | oxide precipitate | gettering efficiency | wafer | isothermal annealing | iron gettering

Heterogeneous iron precipitation in silicon was studied experimentally by measuring the gettering efficiency of oxide precipitate density of 1×10exp10cm−3. The wafers were contaminated with varying iron concentrations, and the gettering efficiency was studied using isot... View more
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