publication . Article . 2007

experimental and theoretical study of heterogeneous iron precipitation in silicon

A. Haarahiltunen; H. Väinölä; O. Anttila; M. Yli-Koski; J. Sinkkonen;
Open Access
  • Published: 15 Feb 2007 Journal: Journal of Applied Physics, volume 101, page 43,507 (issn: 0021-8979, eissn: 1089-7550, Copyright policy)
  • Publisher: AIP Publishing
  • Country: Finland
Abstract
Heterogeneous iron precipitation in silicon was studied experimentally by measuring the gettering efficiency of oxide precipitate density of 1×10exp10cm−3. The wafers were contaminated with varying iron concentrations, and the gettering efficiency was studied using isothermal annealing in the temperature range from 300 to 780°C. It was found that iron precipitation obeys the so called s-curve behavior: if iron precipitation occurs, nearly all iron is gettered. For example, after 30 min annealing at 700°C, the highest initial iron concentration of 8×10exp13cm−3 drops to 3×10exp12cm−3, where as two lower initial iron concentrations of 5×10exp12 and 2×10exp13cm−3 r...
Subjects
free text keywords: Energy, Electrical engineering, iron, heterogeneous iron precipitation, oxide precipitate, gettering efficiency, wafer, isothermal annealing, iron gettering, Silicon, chemistry.chemical_element, chemistry, Atmospheric temperature range, Physics, Metallurgy, Precipitation (chemistry), Annealing (metallurgy), Supersaturation, Oxide, chemistry.chemical_compound, Dissolution, Nucleation
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publication . Article . 2007

experimental and theoretical study of heterogeneous iron precipitation in silicon

A. Haarahiltunen; H. Väinölä; O. Anttila; M. Yli-Koski; J. Sinkkonen;