publication . Article . 2007

Experimental and theoretical study of heterogeneous iron precipitation in silicon

Antti Haarahiltunen; Hele Väinölä; O. Anttila; Marko Yli-Koski; Juha Sinkkonen;
Open Access English
  • Published: 01 Jan 2007
  • Publisher: AIP Publishing
  • Country: Finland
Abstract
Heterogeneous iron precipitation in silicon was studied experimentally by measuring the gettering efficiency of oxide precipitate density of 1×10exp10cm−3. The wafers were contaminated with varying iron concentrations, and the gettering efficiency was studied using isothermal annealing in the temperature range from 300 to 780°C. It was found that iron precipitation obeys the so called s-curve behavior: if iron precipitation occurs, nearly all iron is gettered. For example, after 30 min annealing at 700°C, the highest initial iron concentration of 8×10exp13cm−3 drops to 3×10exp12cm−3, where as two lower initial iron concentrations of 5×10exp12 and 2×10exp13cm−3 r...
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free text keywords: Energy, Physics, Electrical engineering, iron, silicon, heterogeneous iron precipitation, oxide precipitate, gettering efficiency, wafer, isothermal annealing, iron gettering, Annealing (metallurgy), Nucleation, Supersaturation, Dissolution, Atmospheric temperature range, Materials science, Metallurgy, Oxide, chemistry.chemical_compound, chemistry, chemistry.chemical_element, Precipitation (chemistry)
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