publication . Article . 2013

Influence of Substrate Temperature on Structural, Electrical and Optical Properties of Ito Thin Films Prepared by RF Magnetron Sputtering

BO HE; LEI ZHAO; JING XU; HUAIZHONG XING; SHAOLIN XUE; MENG JIANG;
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  • Published: 01 Jan 2013 Journal: Surface Review and Letters, volume 20, page 1,350,045 (issn: 0218-625X, eissn: 1793-6667, Copyright policy)
  • Publisher: World Scientific Pub Co Pte Lt
Abstract
<jats:p> In this paper, we investigated indium-tin-oxide (ITO) thin films on glass substrates deposited by RF magnetron sputtering using ceramic target to find the optimal condition for fabricating optoelectronic devices. The structural, electrical and optical properties of the ITO films prepared at various substrate temperatures were investigated. The results indicate the grain size increases with substrate temperature increases. As the substrate temperature grew up, the resistivity of ITO films greatly decreased. The ITO film possesses high quality in terms of electrode functions, when substrate temperature is 480°C. The resistivity is as low as 9.42 × 10<jats...
Subjects
free text keywords: Indium-tin-oxide (ITO), RF magnetron sputtering, structure, electrical properties, optical properties, Materials Chemistry, Surfaces, Coatings and Films, Surfaces and Interfaces, Condensed Matter Physics, Sputter deposition, Electrode, Chemistry, Analytical chemistry, Transmittance, Solar cell, law.invention, law, Substrate (chemistry), Electrical resistivity and conductivity, Thin film, Ceramic, visual_art.visual_art_medium, visual_art, Optoelectronics, business.industry, business
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publication . Article . 2013

Influence of Substrate Temperature on Structural, Electrical and Optical Properties of Ito Thin Films Prepared by RF Magnetron Sputtering

BO HE; LEI ZHAO; JING XU; HUAIZHONG XING; SHAOLIN XUE; MENG JIANG;