publication . Article . 2010

Modulación del índice de refracción de guías de onda ópticas de polímero SU-8 por medio de un proceso hibrido fototérmico

Salazar-Miranda, D.; Castillón, F. F.; Sánchez-Sánchez, J. J.; Angel-Valenzuela, J. L.; Márquez, H.;
Open Access English
  • Published: 01 Apr 2010
  • Publisher: UAM, Unidad Iztapalapa, División de Ciencias Básicas e Ingeniería
This paper describes the fabrication and characterization of multimode polymer optical waveguides obtained using a SU-8-2005 polymer by means of photolithographic process. Critical information about refractive index modulation of polymer waveguides as function of fabrication parameters as pre-baked and ultraviolet exposure times is presented. Physical properties of the waveguides were determined by means prism-coupling technique, optical and SEM microscopy. Este trabajo describe la fabricación y caracterización de gulas de onda ópticas multimodales obtenidas a partir del polímero SU-8-2005 mediante un proceso de microlitografía. Presentamos información important...
free text keywords: optical waveguides, polymer, photolithography, modulation, refractive index, guías de onda, polímeros, fotolitografía, modulación, índice de refracción

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