publication . Patent . 2015

Mikro-Elektro-Mechanisches System und Verfahren zum Herstellen desselben

Lisec, Thomas; Stoppel, Fabian;
Open Access German
  • Published: 01 Jan 2015
  • Country: Germany
A microelectromechanical system comprises a deflectable actuator plate and a stop surface. An integral piezoelectric functional layer of the deflectable actuator plate is formed over an area (APS) of the actuator plate. The deflectable actuator plate is designed to implement a concave curvature in at least one driven or non-driven state, wherein the stop surface is arranged in a manner facing a concave side of the deflectable actuator plate defined by the concave curvature. The deflectable actuator plate is designed to provide a mechanical contact between the deflectable actuator plate and the stop surface in the state in which said deflectable actuator plate im...
arXiv: Computer Science::OtherComputer Science::RoboticsPhysics::Fluid DynamicsComputer Science::Systems and ControlPhysics::Space Physics
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