Verfahren zur simultanen Mikrostrukturierung und Passivierung

Patent German OPEN
Mayer, K.; Kray, D.;

DE 102009004902 B3 UPAB: 20100524 NOVELTY - Silicon-containing solids microstructuring and passivation involves guiding a fluid jet over area of solid, where the fluid jet contains precursor for passivation of the solid surface. A laser jet is coupled in the fluid jet, ... View more
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