publication . Article . 2016

Automated aberration correction of arbitrary laser modes in high numerical aperture systems

Hering, Julian; Waller, Erik H.; Freymann, Georg von;
Open Access English
  • Published: 01 Jan 2016
Abstract
Controlling the point-spread-function in three-dimensional laser lithography is crucial for fabricating structures with highest definition and resolution. In contrast to microscopy, aberrations have to be physically corrected prior to writing, to create well defined doughnut modes, bottlebeams or multi foci modes. We report on a modified Gerchberg-Saxton algorithm for spatial-light-modulator based automated aberration compensation to optimize arbitrary laser-modes in a high numerical aperture system. Using circularly polarized light for the measurement and first-guess initial conditions for amplitude and phase of the pupil function our scalar approach outperform...
Subjects
arxiv: Physics::Optics
free text keywords: Aberration Compensation, Laser Modes, Phase Retrieval, Optical Components
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