Plasmareaktor mit Prallstroemung zur Oberflaechenbehandlung

Patent German OPEN
Elkine, B. ; Mayer, J. ; Oehr, C. (1999)

The reactor includes a plasma treatment chamber (26), a gas distribution space, a gas suction space (29), and reaction gas entry and exit connections (7, 1). The gas distribution and suction spaces are separated from the gas treatment chamber by means of a flat structur... View more
Share - Bookmark