Molecular Models for DSMC Simulations of Metal Vapor Deposition

Other literature type OPEN
Venkattraman, A; Alexeenko, Alina A;
(2010)
  • Publisher: Purdue University
  • Subject: Engineering
    arxiv: Physics::Accelerator Physics | Condensed Matter::Superconductivity

The direct simulation Monte Carlo (DSMC) method is applied here to model the electron‐beam (e‐beam) physical vapor deposition of copper thin films. A suitable molecular model for copper‐copper interactions have been determined based on comparisons with experiments for a... View more
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