Gaseous slip flow analysis of a micromachined flow sensor for ultra small flow applications

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Jang, Jaesung; Wereley, Steven;
  • Publisher: Purdue University

The velocity slip of a fluid at a wall is one of the most typical phenomena in microscale gas flows. This paper presents a flow analysis considering the velocity slip in a capacitive micro gas flow sensor based on pressure difference measurements along a microchannel. T... View more
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