publication . Thesis . 2013

Robust micromachining of compliant mechanisms for out-of-plane microsensors

Khosraviani, Kourosh;
Open Access
  • Published: 19 Jul 2013
  • Country: Canada
Abstract
Micro-Electro-Mechanical-Systems (MEMS) take advantage of a wide range of very reliable, and well established existing microelectronics fabrication techniques. Due to the planar nature of these techniques, out-of-plane MEMS devices must be fabricated in-plane and assembled afterwards in order to create out-of-plane three-dimensional structures. Out-of-plane microstructures extend the design space of the MEMS based devices and overcome many limitations of the in-plane processing. Nevertheless, several issues have to be addressed in order to integrate an out-of-plane structure into an existing process. These include robustness, yield, reliability, assembly techniq...
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