publication . Article . 2012

Tilted $c$-Axis Thin-Film Bulk Wave Resonant Pressure Sensors With Improved Sensitivity

Emil Anderås; Ilia Katardjiev; Ventsislav Yantchev;
Open Access
  • Published: 01 Jan 2012 Journal: IEEE Sensors Journal, volume 12, pages 2,653-2,654 (issn: 1530-437X, eissn: 1558-1748, Copyright policy)
  • Publisher: Institute of Electrical and Electronics Engineers (IEEE)
  • Country: Sweden
Abstract
Aluminum nitride thin-film bulk wave resonant pressure sensors employing c- and tilted c-axis texture, have been fabricated and tested for their pressure sensitivities. The c-axis tilted film bulk acoustic resonators pressure sensors demonstrate substantially higher-pressure sensitivity compared to its c-axis oriented counterpart. More specifically, the thickness plate quasi-shear resonance has demonstrated the highest pressure sensitivity while further being able to preserve its performance in liquid environment.
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Subjects
arXiv: Condensed Matter::Materials Science
free text keywords: AlN, FBAR, sensitivity, micro-acoustic, Other Electrical Engineering, Electronic Engineering, Information Engineering, Annan elektroteknik och elektronik, Optoelectronics, business.industry, business, Aluminium, chemistry.chemical_element, chemistry, Pressure sensor, Resonance, Pressure measurement, law.invention, law, Uniaxial crystal, Materials science, Resonator, Thin film, Nitride, Electrical engineering
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