Tilted c-Axis Thin-Film Bulk Wave Resonant Pressure Sensors With Improved Sensitivity

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Anderås, Emil; Katardjiev, Ilia; Yantchev, Ventsislav;
  • Publisher: Uppsala universitet, Fasta tillståndets elektronik
  • Identifiers: doi: 10.1109/JSEN.2012.2199482
  • Subject: pressure sensor | AlN | FBAR | Other Electrical Engineering, Electronic Engineering, Information Engineering | Annan elektroteknik och elektronik | sensitivity | micro-acoustic
    arxiv: Physics::Fluid Dynamics

Aluminum nitride thin film bulk wave resonant pressure sensors employing c- and tilted c-axis texture, have been fabricated and tested for their pressure sensitivities. The c-axis tilted FBAR pressure sensors demonstrate substantially higher pressure sensitivity compare... View more
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