Materials selection and design of microelectrothermal bimaterial actuators

Article English OPEN
Prasanna, S.; Spearing, S.M.;

A common form of MEMS actuator is a thermally actuated bimaterial, which is easy to fabricate by surface micromachining and permits out of plane actuation, which is otherwise difficult to achieve. This paper presents an analytical framework for the design of such microe... View more
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