publication . Article . 2007

Materials selection and design of microelectrothermal bimaterial actuators

S. Prasanna; S.M. Spearing;
Open Access English
  • Published: 01 Apr 2007
  • Country: United Kingdom
A common form of MEMS actuator is a thermally actuated bimaterial, which is easy to fabricate by surface micromachining and permits out of plane actuation, which is otherwise difficult to achieve. This paper presents an analytical framework for the design of such microelectrothermal bimaterial actuators. Mechanics relationships for a cantilever bimaterial strip subjected to a uniform temperature were applied to obtain expressions for performance metrics for the actuator, i.e., maximum work/volume, blocked (force) moment, and free-end (displacement) slope. Results from finite-element analysis and closed form relations agree well to within 1%. The optimal performa...
Persistent Identifiers
arXiv: Computer Science::Other
free text keywords: Mechanical Engineering, Electrical and Electronic Engineering, Modulus, Cantilever, Surface micromachining, Material properties, Finite element method, Structural engineering, business.industry, business, Materials science, Actuator, Microelectromechanical systems, Young's modulus, symbols.namesake, symbols
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