publication . Article . 2003

Materials selection in micromechanical design: an application of the Ashby approach

Srikar, V.T.; Spearing, S.M.;
Open Access
  • Published: 01 Jan 2003 Journal: Journal of Microelectromechanical Systems, volume 12, pages 3-10 (issn: 1057-7157, Copyright policy)
  • Publisher: Institute of Electrical and Electronics Engineers (IEEE)
  • Country: United States
Abstract
The set of materials available to microsystems designers is rapidly expanding. Techniques now exist to introduce and integrate a large number of metals, alloys, ceramics, glasses, polymers, and elastomers into microsystems, motivating the need for a rational approach for materials selection in microsystems design. As a step toward such an approach, we focus on the initial stages of materials selection for micromechanical structures with minimum feature sizes greater than 1 /spl mu/m. The variation of mechanical properties with length scale and processing parameters is discussed. Bounds for initial design values of several properties are suggested and the necessi...
Subjects
free text keywords: Mechanical Engineering, Electrical and Electronic Engineering, Microsystem, Ceramic, visual_art.visual_art_medium, visual_art, Electronic engineering, Inorganic materials, Materials science, Stress measurement, Design values, Microelectromechanical systems, Residual stress, Surface micromachining
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publication . Article . 2003

Materials selection in micromechanical design: an application of the Ashby approach

Srikar, V.T.; Spearing, S.M.;